The semiconductor manufacturing industry has stringent requirements for precision, cleanliness, and speed. Air bearings are ideally suited to this environment, offering frictionless motion without the need for lubrication. Other pertinent benefits include: sub-nanometer repeatability, high speed, high stiffness, straighter motion, zero wear, zero vibration and reduced noise. They provide the enabling technology in many semiconductor applications including: Wafer Inspection, Wafer Probing, Wafer Repair, and Ion Implantation.
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