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S2225401S2225401 – 250mm x 76mm – Precision Zone Air Bars

 
250mm x 76mm – Precision Zone Air Bars

250mm x 76mm - Precision Zone Air Bars
S2225401S2225401

The 250mm Precision Zone Air Bar provides our highest level of stability and control. These modular, ultra-precision positioning components are assembled in arrays and are ideal beneath the specific areas of interest during manufacturing or inspection. Easy to apply, replace or change, they provide non-contact glass handling control to ±5µm.

Units: US METRIC
TitleSpecifications
Size250mm250mm
SKUS2225401S2225401
Input Pressure20 psi0.14 MPa
Input Vacuum45.5 in H2O45.5 in H2O
Recommended Glass Fly Height25 microns25 microns
Fly Height Control±5 microns±5 microns
Air Film Stiffness1.31 lbs/µ in0.23 N/micron
Stability±1 nanometer±1 nanometer
Clean Dry Air Flow at 25 microns10.05 SLPM10.05 SLPM
Vacuum Flow at 25 microns6.3 SLPM6.3 SLPM
Length9.84 in250 mm
Width3.0 in76 mm
Height1.97 in50 mm
Weight3.08 lbs1.4 kg
Housing Material/FinishAluminum/AnodizedAluminum/Anodized
Porous Media MaterialCarbonCarbon
Bearing Face Surface Size - Carbon2.91 in x10 in74mm x 250mm
Bearing Face Surface Flatness0.00008 in0.002 mm
Air SupplyBottom-Mounted ManifoldBottom-Mounted Manifold
Vacuum SupplyBottom MountedBottom Mounted
Recommended Pressure Range3 - 47 psi20 - 324 kPa
Maximum Pressure Supply*47 psi324 kPa
Substrate Sizeup through Gen 10 and beyondup through Gen 10 and beyond
Substrate Thickness0.02in to 0.20in0.5 to 5.0 mm
Maximum Substrate Speed2m/sec*2m/sec*
** Supplying pressure above this maximum could damage the product, will void the warranty, and could cause a hazardous condition.* Supplying pressure above this maximum could damage the product, will void the warranty, and could cause a hazardous condition.

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