| Title | Specifications |
|---|---|
| Size | 250 mm250 mm |
| SKU | S2225401S2225401 |
| Input Pressure | 20 psi0.14 MPa |
| Input Vacuum | 45.5 in H2O45.5 in H2O |
| Recommended Glass Fly Height | 25 µm25 µm |
| Fly Height Control | ±5 µm±5 µm |
| Air Film Stiffness | 1.31 lb/µin0.23 N/µm |
| Stability | ±1 nanometer±1 nanometer |
| Clean Dry Air Flow at 25 microns | 8.0 - 17.0 SCFH3.46 - 7.35 NLPM |
| Vacuum Flow at 25 microns | 13.3 SCFH5.77 NLPM |
| Length | 9.84 in250 mm |
| Width | 3.0 in76 mm |
| Height | 1.97 in50 mm |
| Weight | 3.08 lb1.4 kg |
| Housing Material/Finish | Aluminum/AnodizedAluminum/Anodized |
| Porous Media Material | CarbonCarbon |
| Bearing Face Surface Size - Carbon | 2.91 in x10 in74 mm x 250 mm |
| Bearing Face Surface Flatness | 0.00008 in0.002 mm |
| Air Supply | Bottom-Mounted ManifoldBottom-Mounted Manifold |
| Vacuum Supply | Bottom MountedBottom Mounted |
| Recommended Pressure Range | 3 - 47 psi20 - 324 kPa |
| Maximum Pressure Supply* | 47 psi324 kPa |
| Substrate Size | up through Gen 10 and beyondup through Gen 10 and beyond |
| Substrate Thickness | 0.02 in to 0.20 in0.5 to 5.0 mm |
| Maximum Substrate Speed | 2 m/sec*2 m/sec* |
| * | * Supplying pressure above this maximum could damage the product, will void the warranty, and could cause a hazardous condition.* Supplying pressure above this maximum could damage the product, will void the warranty, and could cause a hazardous condition. |
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