After reviewing design factors, a customer drew the conclusion that they needed 50µm of lift, but felt that other parameters would suffer (i.e. stiffness, air consumption, and accuracy). But since there was no data available, this customer worried that the chuck would not perform adequately.

The truth is that the Flat Panel Precision Chuck CAN be operated at 50µm. The air consumption is higher and the stiffness is lower than at the designed 25µm fly height, but not out of the range of viability.

Testing should be performed on the intended process to determine suitability.
uestion 2